• DocumentCode
    3710812
  • Title

    SOI multidirectional thermoelectric flow sensor for harsh environment applications

  • Author

    Andrea De Luca;Giorgia Longobardi;Florin Udrea

  • Author_Institution
    Engineering Department, University of Cambridge, 9 JJ Thomson Avenue, CB3 0FA, UK
  • fYear
    2015
  • Firstpage
    95
  • Lastpage
    98
  • Abstract
    In this paper we present a novel SOI CMOS multidirectional thermoelectric flow sensor. For the first time to the best knowledge of the authors, the sensor is shown to be able to cope with harsh environment conditions, such as 150 °C ambient temperature and humidity up to 75%.
  • Keywords
    "Temperature sensors","Humidity","Silicon","Stress","Heating","Temperature measurement"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2015 International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4799-8862-4
  • Type

    conf

  • DOI
    10.1109/SMICND.2015.7355173
  • Filename
    7355173
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3710812