Title :
Study of the von Mises stress in RF MEMS switch anchors
Author :
G. Boldeiu;D. Vasilache;V. Moagar;A. Stefanescu;G. Ciuprina
Author_Institution :
National Institute for Research and Development in Microtechnologies, 126A Erou Iancu Nicolae, 077190, Romania
Abstract :
In this paper an analysis of the von Mises stress in the RF MEMS switch structures is presented. This study was performed to analyze and optimize the stress in the anchors area for switch structures addressed to K and W frequency bands. Different types of anchors were taken into consideration and a comparison of von Mises stress has been performed. Optimization showed that it is possible to reduce stress up to more than 80% of its baseline, to the values much smaller than the breaking coefficient (100Mpa).
Keywords :
"Stress","Radio frequency","Microswitches","Optimization","Reliability","Springs"
Conference_Titel :
Semiconductor Conference (CAS), 2015 International
Print_ISBN :
978-1-4799-8862-4
DOI :
10.1109/SMICND.2015.7355213
