DocumentCode :
3710852
Title :
On the models used for TCAD simulations of Diamond Schottky Barrier Diodes
Author :
N. Donato;M. Antoniou;E. Napoli;G. Amaratunga;F. Udrea
Author_Institution :
Engineering Department, University of Cambridge, CB2 1PZ, UK
fYear :
2015
Firstpage :
223
Lastpage :
226
Abstract :
In this paper we present a numerical analysis of Schottky Barrier Diodes (SBDs) based on CVD (Chemical Vapour Deposition) Diamond. Material and interface models suitable for TCAD (Technology Computer Aided Design) finite element simulations were implemented in the software and their validity was assessed against experimental results obtained on MIP+(Metal-Intrinsic layer-highly P doped substrate) SBDs with Al and Au as Schottky metal contacts both at room and higher temperature conditions. The paper also highlights the need to improve such TCAD models since the complex behavior of Diamond based devices is still not well captured in static and dynamic conditions. The present work also discusses the role of the Oxygen surface interface in the on state performances of the SBDs.
Keywords :
"Diamonds","Semiconductor process modeling","Temperature dependence","Fitting","Numerical models","Substrates","Mathematical model"
Publisher :
ieee
Conference_Titel :
Semiconductor Conference (CAS), 2015 International
ISSN :
1545-827X
Print_ISBN :
978-1-4799-8862-4
Type :
conf
DOI :
10.1109/SMICND.2015.7355214
Filename :
7355214
Link To Document :
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