Title :
Structural and morphological properties of gallium doped ZnO thin films deposited by ultrasonic spray pyrolysis
Author :
J. Vinoth Kumar;A. Maldonado;M. de la L. Olvera;J. Vega-P?rez;Y. Koudriavtsev
Author_Institution :
Departamento de Ingenier?a El?ctrica, Centro de Investigaci?n y de Estudios Avanzados del Instituto Polit?cnico Nacional, CINVESTAV-IPN, SEES, Apartado Postal 14740, M?xico, D.F., 07000, M?xico
Abstract :
Flower headed hexagonal nanostructures were obtained for gallium doped zinc oxide, GZO, thin films deposited on glass substrates by ultrasonic spray pyrolysis, USP. Effect of substrate temperature and deposition time was investigated on the structural and morphological properties. XRD results witnessed that films were preferentially grown along the (002) plane. Flower-like structures were discovered on tip of the hexagons through SEM characterization.
Keywords :
"Zinc oxide","II-VI semiconductor materials","Films","Gallium","Yttrium","Acoustics","Substrates"
Conference_Titel :
Electrical Engineering, Computing Science and Automatic Control (CCE), 2015 12th International Conference on
DOI :
10.1109/ICEEE.2015.7357969
