• DocumentCode
    3713843
  • Title

    A study of nano structure by roll to roll imprint lithography

  • Author

    S. Hassan;M.S. Yusof;M.I. Maksud;M.N. Nodin;N.A. Rejab;K.A. Mamat

  • Author_Institution
    Faculty of Mechanical and Manufacturing Engineering, Universiti Tun Hussein Onn Malaysia, Batu Pahat, Johor, Malaysia
  • fYear
    2015
  • Firstpage
    132
  • Lastpage
    135
  • Abstract
    Imprint lithography process is a unique printing technique that create graphic, electronic and biomedical printed on substrates. PET plastics are an example of materials that can be used as printing substrate in producing nano-scale electronic and medical devices. Here, it is proposed that extending imprint lithography technique into the multiple nano-structure printing fine solid lines onto substrate. Imprint lithography is a low cost printing technique commonly used in manufacturing and printing industry. This study exhibit successful fine solid lines imprinting below 1 micrometer in line width, gap and height on polyethylene-terephthalate (PET) substrate. This paper illustrates the use of imprint lithography method in producing multiple nano-solid lines printing capability as application of printing electronic, graphic and bio-medical.
  • Keywords
    "Printing","Lithography","Substrates","Positron emission tomography","Plastics","Silicon","OFETs"
  • Publisher
    ieee
  • Conference_Titel
    Technology Management and Emerging Technologies (ISTMET), 2015 International Symposium on
  • Type

    conf

  • DOI
    10.1109/ISTMET.2015.7359016
  • Filename
    7359016