Design and optimization of high quality factor MEMS piezoelectric resonator with pseudo electrodes

The following work reports design and optimization of a MEMS resonator with some pseudo electrodes. Three, five and seven psuedo electrodes are placed and simulated. It has been observed that five psuedo electrodes structure gives very high quality factor in addition to minimum false modes interference. Simulation is done on COMSOL multiphysics. Furthermore, influence of various piezoelectric materials like AlN, PZT and ZnO were studied proving AlN as superb thin piezoelectric film or electroacoustic material, to have a very high Quality factor. Appropriate piezoelectric material is needed in addition with psuedo electrodes in order to work efficiently for filter and RF applications.