• DocumentCode
    3714777
  • Title

    Thermal characteristics of diamond film coatings for GaN HEMT devices

  • Author

    Raoul Guggenheim;Jonathan A. Rothschild;Lior Rodes;Alon Hoffman

  • Author_Institution
    Microelectronics Directorate, Rafael, Haifa, PO Box 2250, Israel
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Diamond as a heat spreading film for Gallium Nitride (GaN) based devices has been proposed. For the successful integration and heat management, these films need to exhibit high in-plane thermal conductivity. We present a measurement method based on the laser flash method for thin films below 10 μm. The method uses free-standing diamond films on a silicon frame. The method has been used to show the high thermal conductivity of thin diamond films.
  • Keywords
    "Diamonds","Thermal conductivity","Heating","Temperature measurement","Conductivity","Gallium nitride","HEMTs"
  • Publisher
    ieee
  • Conference_Titel
    Microwaves, Communications, Antennas and Electronic Systems (COMCAS), 2015 IEEE International Conference on
  • Type

    conf

  • DOI
    10.1109/COMCAS.2015.7360384
  • Filename
    7360384