Modeling and measurement algorithm of hexapod platform sensor using inverse kinematics

This paper covers the design of a series of hexapod platform sensors and an inverse kinematics based measurement algorithm. Hexapod platforms are widely used as the motion positioning devices with 6 degrees of freedom (DOF). In this paper, we convert the positioning stages to the platform sensors to determine the motion errors of a target positioning device by measuring the length changes of the struts and the displacements of the bottom stages. Based on the geometric layout and the topology, the inverse kinematic models are built for the platforms to establish the relationship of the motion of the top platform and the changes of the struts and the marks on the bottom stages. Based on the kinematic model, a measurement algorithm is proposed for the devices.