Three-dimensional fluid-structural interaction simulation of slotted cymbal shaped valve piezoelectric micropump

At present, the stress of general passive valves in piezoelectric micro-pump is relatively large. Under the stress, the passive valves switched frequently will be fatigue damage and be led to the failure, which will largely reduce the reliability of piezoelectric micro-pump. Aiming at this situation, a slotted cymbal shaped valve is proposed, and then a slotted cymbal shaped valve piezoelectric pump is designed. Commercial software ANSYS is employed to perform the fluid-structural interaction analysis for the pump, and the numerical results are presented. The simulation results showed that the maximum flow rate is 81.56 ml/min at 400Hz, and the maximum von Mises stress of the valve is 2.07×107 Pa. Meanwhile, it is shown that the numerical method of fluid-structural interaction can be applied to analyze the similar piezoelectric micro-pump.