Title :
Effect of Electron Irradiation on MISFET Integrated Hydrogen Sensors
Author :
Boris I. Podlepetsky
Author_Institution :
Moscow Eng. Phys. Inst., Nat. Res. Nucl. Univ. MEPhI, Moscow, Russia
Abstract :
The electron irradiation effect on hydrogen sensitivity of the integrated sensors based on MISFET has been investigated. The estimation of critical doses has been done according to developed models of hydrogen and radiation sensitivities of MISFET sensors.
Keywords :
"Hydrogen","Sensitivity","Sensor phenomena and characterization","Radiation effects","MISFETs","Ionizing radiation sensors"
Conference_Titel :
Radiation and Its Effects on Components and Systems (RADECS), 2015 15th European Conference on
Print_ISBN :
978-1-5090-0232-0
DOI :
10.1109/RADECS.2015.7365607
