Robust control of piezoelectric micro positioning actuator using self-sensing method

Piezoelectric actuators are the one type of actuators commonly used in micro positioning tasks. These actuators Because of their fast responses and also high degree of accuracy and precision would be the best candidate for the precise positioning operations. Despite their resolutions, there are some nonlinear behaviors in these materials, such as creep and hysteresis, which can affect their fine performances. Beside their nonlinear behaviors, another challenging problem is to deal with the position measurement. Position measurement has a serious restriction in micro scales caused by required dimensions and precision. To eliminate this deficiency, appropriate position self-sensing could be an alternative method. Therefore, in this study, a position self-sensing circuit with high precision has been proposed. Then a robust control technique was applied to provide the desire position tracking for the system. Finally, after implementing the controller experimentally, its capability in position control with the designed self-sensing system will be demonstrated.