Title :
Casimir and optical forces on a silicon Nano-Opto-Eletro-Mechanical device
Author :
Janderson R. Rodrigues;Felipe S. S. Rosa;Vilson R. Almeida
Author_Institution :
Instituto Tecnol?gico de Aeron?utica, ITA, S?o Jos? dos Campos - SP, 12228-900, Brazil
Abstract :
We investigate the effect of Casimir force on a silicon Nano-Opto-Electro-Mechanical System (NOEMS) device, based on slot-waveguides and driven by optical forces. We observed that it affects the device´s critical points of stability, which affects its design parameters.
Keywords :
"Optical waveguides","Casimir effect","Force","Optical device fabrication","Silicon","Optical sensors","Nonlinear optics"
Conference_Titel :
Microwave and Optoelectronics Conference (IMOC), 2015 SBMO/IEEE MTT-S International
DOI :
10.1109/IMOC.2015.7369154
