In-plane Βulk-Micromachining fabrication of high dynamic range tactical grade open loop and closed loop MEMS accelerometers

In this paper we describe open loop and closed loop capacitive MEMS accelerometers fabricated using In-Plane Bulk-Micromachining technology. Our robust process assures high yield and high reliability of both product types. The MAXL-OL-2000 open loop accelerometers series shows temperature sensitivity of 20-200μg/°c with typical hysteresis of 1mg, typical TOTO repeatability of 70μg and typical overall repeatability of 1mg. We demonstrate first test results of our MAXL-CL-3030 closed loop ΔΣ accelerometer. Typical Vibration Rectification Error of 10(μg/g²rms and scale factor linearity less than 0.1% of full 30g dynamic range are presented.