Title :
Electrochemical vibration sensor with force balance feedback system
Author :
Junbo Wang;Zhengyu Zhang;Guanglei Li;Deyong Chen;Jian Chen
Author_Institution :
State Key Laboratory of Transducer Technolgoy, Institute of Electronics, Chinese Academy of Sciences, University of Chinese Academy of Sciences Beijing, P.R. China
Abstract :
This article establishes the theoretical model of the Force Balance Feedback (FBF) system for the MEMS Electrochemical Vibration Sensor (MEVS). It is illustrated that the transfer function of the sensor is mainly dominated by the FBF system. The FBF system designed is applied to the MEVS, and thus good performance in the linearity and bandwidth of the sensor is achieved. Additionally, it increases the measurable range of the sensor, which makes the sensor work with stronger motion. Experimental tests show that the 3dB bandwidth of the sensor with FBF system is expanded from 0.3Hz-14Hz to 0.01Hz-60Hz.
Keywords :
"Vibrations","Bandwidth","Force","Transfer functions","Distortion","Resonant frequency","Micromechanical devices"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370241
