Live demonstration: Microsystem integration of a palladium-based MEMS hydrogen gas sensor

In this live demonstration, we present the microsystem integration of a palladium-based MEMS capacitive hydrogen gas sensor and its sub-components. The system includes all the elements of the data acquisition chain. The MEMS device is interfaced by a capacitance-to-digital converter for signal conditioning, and a microcontroller associated to a radio for both data processing and transmitting. Moreover a specific housing has been designed with trade consideration, including a Porex® microporous polymer membrane for moisture protection. Finally, a dedicated graphic user interface has been implemented with assisted calibration or recording procedures, and an oscilloscope for data monitoring. Thanks to compatibilities with ZigBee or Bluetooth low energy protocols, this system is directly dedicated to interconnected sensor nodes applications within the Internet-of-Things vision.