• DocumentCode
    3721759
  • Title

    Live demonstration: CMOS BEOL-embedded 3-axis accelerometer

  • Author

    Piotr Michalik;Josep M. Sánchez-Chiva;Daniel Fernández;Jordi Madrenas

  • Author_Institution
    Universitat Polité
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given. We present a live demonstration of 3-axis CMOS BEOL-embedded acceleration sensor obtained by simple isotropic inter-metal dielectric etching without any additional substrate etching steps. The device leverages the availability of thick metal and via layers of a 0.25 μm RF CMOS technology and is monolithically integrated with on-chip sensing electronics.
  • Keywords
    "Accelerometers","CMOS integrated circuits","Micromechanical devices","Acceleration","Etching","Metals","Sensors"
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2015 IEEE
  • Type

    conf

  • DOI
    10.1109/ICSENS.2015.7370295
  • Filename
    7370295
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3721759