Title :
Live demonstration: CMOS BEOL-embedded 3-axis accelerometer
Author :
Piotr Michalik;Josep M. Sánchez-Chiva;Daniel Fernández;Jordi Madrenas
Author_Institution :
Universitat Polité
Abstract :
Summary form only given. We present a live demonstration of 3-axis CMOS BEOL-embedded acceleration sensor obtained by simple isotropic inter-metal dielectric etching without any additional substrate etching steps. The device leverages the availability of thick metal and via layers of a 0.25 μm RF CMOS technology and is monolithically integrated with on-chip sensing electronics.
Keywords :
"Accelerometers","CMOS integrated circuits","Micromechanical devices","Acceleration","Etching","Metals","Sensors"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370295
