• DocumentCode
    3721766
  • Title

    Carbon nanotube based gas sensor arrays on rigid and flexible substrates

  • Author

    Ahmed Abdelhalim;Florin Loghin;Maximilian Winkler;Christopher Zeiser;Alaa Abdellah;Paolo Lugli

  • Author_Institution
    Institute for Nanoelectronics, Technische Universitä
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    We report a highly reproducible Carbon nanotube (CNT) based gas sensor arrays, which are able to discriminate between NH3, CO, CO2 and ethanol. Each sensor array is composed of four sensing elements where metallic nanoparticles (NPs) were utilized to alter their response towards the different test gases. Au functionalization was capable to separate NH3 from the other gases, while Pd and Cr functionalization distinguished between CO/CO2 and NH3/ethanol. We present as well the fabrication of Au functionalized CNT gas sensor array fabricated on flexible substrate (Kapton), which was able to separate NH3 from the other test gases.
  • Keywords
    "Sensor arrays","Gas detectors","Gold","Gases","Substrates","Principal component analysis","Carbon nanotubes"
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2015 IEEE
  • Type

    conf

  • DOI
    10.1109/ICSENS.2015.7370302
  • Filename
    7370302