Title :
Carbon nanotube based gas sensor arrays on rigid and flexible substrates
Author :
Ahmed Abdelhalim;Florin Loghin;Maximilian Winkler;Christopher Zeiser;Alaa Abdellah;Paolo Lugli
Author_Institution :
Institute for Nanoelectronics, Technische Universitä
Abstract :
We report a highly reproducible Carbon nanotube (CNT) based gas sensor arrays, which are able to discriminate between NH3, CO, CO2 and ethanol. Each sensor array is composed of four sensing elements where metallic nanoparticles (NPs) were utilized to alter their response towards the different test gases. Au functionalization was capable to separate NH3 from the other gases, while Pd and Cr functionalization distinguished between CO/CO2 and NH3/ethanol. We present as well the fabrication of Au functionalized CNT gas sensor array fabricated on flexible substrate (Kapton), which was able to separate NH3 from the other test gases.
Keywords :
"Sensor arrays","Gas detectors","Gold","Gases","Substrates","Principal component analysis","Carbon nanotubes"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370302