• DocumentCode
    3721779
  • Title

    Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

  • Author

    H. Xie;S. Lan;D. Wang;W. Wang;J. Sun;H. Liu;J. Cheng;J. Ding;Z. Qin;Q. Chen;H. Kang;Z. Tian

  • Author_Institution
    Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This WeThis paper reports a MEMS-based Fourier transform spectrometer (FTS) with small size, high resolution, fast sampling and low cost. The MEMS scanning mirror can generate over 300 μm piston motion at 10 Hz with only 7Vpp and maintain a very small tilting less than 0.03°. This high scanning performance is achieved by an innovative three-level ladder actuator design and a unique placement of sixteen of such ladder actuators. The FTS can be handheld and cover a wide spectral range of 800-2500 nm. The spectral resolution is about 5 nm at 1550nm wavelength.
  • Keywords
    "Actuators","Micromechanical devices","Fourier transforms","Pistons","Micromirrors","Optical filters"
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2015 IEEE
  • Type

    conf

  • DOI
    10.1109/ICSENS.2015.7370315
  • Filename
    7370315
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3721779