Development of SAW acceleration sensor with excellent temperature stability

This work presents the performance improvement of the surface acoustic wave (SAW) based acceleration sensor, which was composed of a one-fix-end cantilever beam with a proof mass attached to its free-end. The 35° rotated Y-cut quartz was used as the piezoelectric substrate and cantilever beam, which provide excellent temperature stability for sensor configuration. The sensor response was simulated and predicted by using the Rayleigh method. Then, the performance of developed SAW acceleration sensor on 35° rotated Y-cut quartz cantilever beam was evaluated by using the vibration table. High sensitivity of 28 kHz/g and excellent temperature stability of ~ 0.85 Hz/°c were observed in the experiments.