• DocumentCode
    3721862
  • Title

    The effect of electrolyte concentration on the characteristics of MEMS based electrochemical seismic sensors

  • Author

    Guanglei Li;Junbo Wang;Deyong Chen;Yonghao Xing;Jian Chen

  • Author_Institution
    State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science, Beijing, China
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper first investigates the effect of electrolyte concentration on the characteristics of the MEMS based electrochemical seismic sensors by experimental method. Testing for the frequency response and sensitivity of the sensor were carried out and experimental results were discussed. Then the relationships between the characteristics and the electrolyte concentration of the sensor are illustrated. It is demonstrated that the characteristics of the seismic sensor depends on the concentration of I2 mostly.
  • Keywords
    "Sensor phenomena and characterization","Micromechanical devices","Sensitivity","Mechanical sensors","Electrodes","Frequency response"
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2015 IEEE
  • Type

    conf

  • DOI
    10.1109/ICSENS.2015.7370402
  • Filename
    7370402
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3721862