Fabrication of microcoil with large tilt-angle on polymer tube for electromagnetically-driven scanner in single fiber endoscope

This paper presents a novel scanner design for single fiber endoscope based on electromagnetically-driven microcoil with large tilt-angle, which can realize larger scanning scale utilizing the high-order resonance modal. As the important driven component, the microcoil with large tilt-angle on the polymer tube with 1mm diameter has been fabricated by our developed spray coating and cylindrical projection UV-lithography system [1], The modals and dynamic response of the designed scanner under high-order vibration have been simulated and analyzed. And the microcoil with 60° tilt-angle has been successfully fabricated on the polymer tube by wet etching and maskless electroplating process. Finally, the electromagnetic property and the maximum driven displacement of fabricated scanner have been evaluated, which is in agreement with that simulated ones.