Polymer coated film bulk acoustic resonator (FBAR) arrays for Indoor Air Quality (IAQ) monitoring

In this work we present a miniaturized electronic nose (E-Nose) sensor platform made by integrating film bulk acoustic resonators (FBARs) with arrays of CMOS oscillators. Each of the FBARs in the array is chemically activated to differing vapors (odors) after depositing a variety of polymers on the active areas of the resonators. To simulate the detection of primary indoor pollutants, we present the experimental results of polymer-gas interaction between 6 different coating polymers and various solvents. Chemical selectivity of the sensor arrays proved by highly distinctive real-time sensor graphs as well as apparent clusters in PCA graph confirms that this integrated FBAR-CMOS sensor arrays can be an essential platform for the miniaturized indoor air-quality monitoring device.