A novel blue-enhanced photodetector using honeycomb structure

In this paper, we present a honeycomb structure to maximize the edge-length in the detector and therefore enhance the detector responsivity in the blue region of the spectrum. A layout of a prototype honeycomb detector was designed and fabricated on a silicon wafer using a standard CMOS process. Based on our measured spectral response, the honeycomb structure improves the photocurrent in blue by about 60%. Moreover, the honeycomb detector demonstrates 20% less dark current than in conventional detector. Simulation results using MEDICI confirm the measured data.