Yield forecasting in fab-to-fab production migration based on Bayesian Model Fusion

Yield estimation is an indispensable piece of information at the onset of high-volume production of a device. It can be used to refine the process/design in time so as to guarantee high production yield. In the case of migration of production of a specific device from a source fab to a target fab, yield estimation in the target fab can be accelerated by employing information from the source fab, assuming that the process parameter distributions in the two fabs are similar, but not necessarily the same. In this paper, we employ the Bayesian Model Fusion (BMF) technique for efficient yield prediction of a device in the target fab. BMF adopts prior knowledge from the source fab and combines it intelligently with information from a limited number of early silicon wafers from the target fab. Thus, BMF allows us to obtain quick and accurate yield estimates at the onset of production in the target fab. The proposed methodology is demonstrated on an industrial RF transceiver.