Oxygen Atom Number Density Measurement in Microwave Excited Atmospheric Pressure O2-Ar Mixture Gas Plasma Using Electric Current Heated Catalytic Probe

Atmospheric pressure oxygen plasma is expected to be applied to agricultural fields, such as sterilization and soil improvement. Understanding of the behavior of the oxygen atom generated by electron collision dissociation of the oxygen molecule in the plasma is important. This paper describes the measurement method of the number density of oxygen atom in oxygen plasma, and experimental results of the spatial distribution of oxygen atom number density.