Title :
Tunable volumic resonator at 150 GHz using MEMS technology
Author :
Raghida Hajj;Matthieu Chatras;Pierre Blondy
Author_Institution :
CCNE Department, Lebanese university, Saida, Lebanon
Abstract :
In this paper, we present a 150 GHz tunable cavity resonator with a high unloaded quality factor Q. The resonator is a micromachined metallic cavity deposed on a fused silica substrate. 3 MEMS varactors are processed on this substrate to obtain a tuning range of about 8%.
Keywords :
"Micromechanical devices","Cavity resonators","Q-factor","Microwave filters","Varactors","Microswitches"
Conference_Titel :
Microwave Symposium (MMS), 2015 IEEE 15th Mediterranean
DOI :
10.1109/MMS.2015.7375465
