• DocumentCode
    3725544
  • Title

    Tunable volumic resonator at 150 GHz using MEMS technology

  • Author

    Raghida Hajj;Matthieu Chatras;Pierre Blondy

  • Author_Institution
    CCNE Department, Lebanese university, Saida, Lebanon
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this paper, we present a 150 GHz tunable cavity resonator with a high unloaded quality factor Q. The resonator is a micromachined metallic cavity deposed on a fused silica substrate. 3 MEMS varactors are processed on this substrate to obtain a tuning range of about 8%.
  • Keywords
    "Micromechanical devices","Cavity resonators","Q-factor","Microwave filters","Varactors","Microswitches"
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium (MMS), 2015 IEEE 15th Mediterranean
  • Type

    conf

  • DOI
    10.1109/MMS.2015.7375465
  • Filename
    7375465
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3725544