• DocumentCode
    3725857
  • Title

    Vibration assisted femtosecond laser hole drilling on fine metal mask for AMOLED

  • Author

    Wonsuk Choi;Sung Hak Cho

  • Author_Institution
    Department of Nano-Mechatronics, University of Science and Technology (UST), 217, Gajeong-ro, Yuseong-gu, Daejeon, Republic of Korea
  • Volume
    1
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Using vibration assisted femtosecond laser machining system, we can control hole taper angle directly by adjusting amplitude of vibration.
  • Keywords
    "Vibrations","Ultrafast optics","Drilling machines","Metals","Machining","Hyperspectral imaging","Indexes"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7375847
  • Filename
    7375847
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3725857