Title :
Vibration assisted femtosecond laser hole drilling on fine metal mask for AMOLED
Author :
Wonsuk Choi;Sung Hak Cho
Author_Institution :
Department of Nano-Mechatronics, University of Science and Technology (UST), 217, Gajeong-ro, Yuseong-gu, Daejeon, Republic of Korea
Abstract :
Using vibration assisted femtosecond laser machining system, we can control hole taper angle directly by adjusting amplitude of vibration.
Keywords :
"Vibrations","Ultrafast optics","Drilling machines","Metals","Machining","Hyperspectral imaging","Indexes"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7375847
