• DocumentCode
    3725879
  • Title

    Dimensional metrology for smart devices using the optical comb of femtosecond pulse lasers

  • Author

    Jonghan Jin;Jungjae Park;Jong-Ahn Kim;Jaewan Kim

  • Author_Institution
    Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon, Republic of Korea
  • Volume
    1
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have proposed the dimensional metrological methods for smart devices using the optical comb of a femtosecond pulse laser. For precision and high speed measurements, these methods were realized based on spectral-domain interferometry.
  • Keywords
    "Optical interferometry","Ultrafast optics","Silicon","Semiconductor device measurement","Thickness measurement","Optical variables measurement","Optical pulses"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7375869
  • Filename
    7375869
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3725879