Title :
High performance materials processing using tailored femtosecond laser pulses
Author :
Koji Sugioka;Katsumi Midorikawa;Fei He;Ya Cheng
Author_Institution :
RIKEN Center for Advanced Photonics
Abstract :
Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.
Keywords :
"Ultrafast optics","Glass","Silicon","Laser beams","Radiation effects","Welding"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7375984
