• DocumentCode
    3725992
  • Title

    High performance materials processing using tailored femtosecond laser pulses

  • Author

    Koji Sugioka;Katsumi Midorikawa;Fei He;Ya Cheng

  • Author_Institution
    RIKEN Center for Advanced Photonics
  • Volume
    2
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.
  • Keywords
    "Ultrafast optics","Glass","Silicon","Laser beams","Radiation effects","Welding"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7375984
  • Filename
    7375984
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3725992