• DocumentCode
    3725995
  • Title

    Experimental and numerical investigation of laser-based short wavelength plasma sources

  • Author

    H. Parchamy;J. Szilagyi;M. Masnavi;M. Richardson

  • Author_Institution
    Townes Laser Institute, College of Optics and Photonics, University of Central Florida, 4304 Scorpius Street, Orlando, Florida 32826, USA
  • Volume
    2
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Laser-based plasma lamps are of particular interest in the semiconductor industry. This study examines the optimum regions of laser-plasma operational space for a number of intense laser-irradiated mass-limited droplet source scenarios.
  • Keywords
    "Niobium","Plasmas","Light sources","Lithography","Sociology","Statistics","Kinetic theory"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7375987
  • Filename
    7375987
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3725995