Title :
High-precision 3-D surface measurement of step-structures using femtosecond lasers
Author :
Young-Jin Kim;Minah Choi;Jiyong Park;Sangwon Hyun;Woodeok Joo;Seung-Woo Kim
Author_Institution :
School of Mechanical &
Abstract :
Femtosecond pulse lasers provide novel possibilities to high-precision optical profilometry for quality assurance of step-structures on 3D microelectronic products based on its time and frequency domain characteristics.
Keywords :
"Optical interferometry","Ultrafast optics","Optical surface waves","Optical pulses","Microelectronics","Frequency measurement","Optical variables measurement"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376011
