• DocumentCode
    3726022
  • Title

    Displacement measurement by single-grating heterodyne interferometry

  • Author

    Shuhua Yan;Guochao Wang;Cunbao Lin;Yukun Luo

  • Author_Institution
    College of Mechatronic Engineering and Automation, National University of Defense Technology (NUDT), Hunan, Changsha, 410073, China
  • Volume
    2
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We presented a displacement measurement system based on single-grating heterodyne interferometry. Our prototype system was demonstrated to achieve a relative measurement accuracy of better than 69 nm with standard deviations of less than 28 nm.
  • Keywords
    "Displacement measurement","Gratings","Optical interferometry","Interferometers","Measurement by laser beam","Optical variables measurement","Phase measurement"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376014
  • Filename
    7376014
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726022