Laser fabrication of micro-lens array on fused silica

We fabricated micro-lens array on fused silica glass using femtosecond and CO2 laser. We micro-machined periodic micro-grooves on the glass surface with femtosecond laser, and polished the patterned surface with CO2 laser. We confirmed that curvature was formed on the surface by heat from the CO2 laser beam as the surface roughness was removed. Depending on the fabricated pattern size, we could fabricate micro-lens array with controlling sizes. Using such this laser fabrication technique, we have demonstrated micro-lens array with various dimension.