Title :
Highly stable periodic structures using nonlinear laser lithography
Author :
O. Yavuz;I. Pavlov;O. Tokel;E. Ergecen;A. Rizaoglu;F. O. Ilday
Author_Institution :
Department of Electrical and Electronics Engineering, Bilkent University, 06800 Ankara, Turkey
Abstract :
Nonlinear laser lithography (NLL) emerged as a novel surface structuring method allowing long-range periodic order. We present mathematical formalism for NLL, analysis of structure stability to perturbations and a way to control final tiling patterns.
Keywords :
"Surface emitting lasers","Surface structures","Rough surfaces","Surface roughness","Simulation","Laser beams","Lithography"
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
DOI :
10.1109/CLEOPR.2015.7376417
