• DocumentCode
    3726397
  • Title

    Nanolithography using micro-scale mask enabled by hyperbolic metamaterial

  • Author

    Donghwan Kim;Yong Rae Cho;Bumki Min

  • Author_Institution
    Department of Mechanical Engineering, Korea advanced institute of science and technology, Daejeon, 305-701, South Korea
  • Volume
    3
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We newly developed a nano-scale patterning method overcoming the diffraction limit of conventional photo-lithography technique by utilizing micro-scale aluminum mask-hyperbolic metamaterials hybrid structures, which is supported by our numerical simulation and experimental results.
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376518
  • Filename
    7376518
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726397