• DocumentCode
    3726399
  • Title

    Terahertz wire-grid polarizer with Al grating

  • Author

    R. Yoshida;I. Yamada;J. Yanagisawa;K. Takano;M. Hangyo;M. Saito;W. Watanabe

  • Author_Institution
    Department of Electronic Systems Engineering, University of Shiga Prefecture, 2500, Hikone, Shiga 522-8533, Japan
  • Volume
    3
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A terahertz (THz) wire-grid polarizer consisting of a micrometer-pitch Al grating on a Si substrate was fabricated by photolithography and wet etching. Extinction ratio (the ratio of TM and TE transmittances) was over 35 dB at 0.5 THz, and over 23 dB in the 0.5-3 THz range. At the Brewster´s angle of Si (74°), TM transmission exceeded 90% in the 0.5-3 THz range. The fabricated polarizer had a higher extinction ratio than conventional free-standing terahertz wire-grid polarizers.
  • Keywords
    "Extinction ratio","Gratings","Silicon","Substrates","Wires","Fabrication","Resists"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376520
  • Filename
    7376520
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726399