• DocumentCode
    3726436
  • Title

    Integrated polarization rotator on silicon waveguides with an asymmetric trench

  • Author

    Yudeuk Kim;Dong Wook Kim;Moon Hyeok Lee;Min Hee Lee;Dong Eun Yoo;Ki Nam Kim;Sang Chul Jeon;Kyong Hon Kim

  • Author_Institution
    Department of Physics, Inha University, Incheon, 402-751, South Korea
  • Volume
    3
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate an integrated polarization rotator with a single trench on a silicon waveguide fabricated using a single etch-step complementary metal-oxide-semiconductor (CMOS)-compatible process. The measured polarization rotation efficiency is 95 % with 0.76 dB insertion loss for a total 67-μm long and 100-nm wide asymmetric trench.
  • Keywords
    "Optical waveguides","Silicon","Semiconductor waveguides","Optimized production technology","Semiconductor device measurement","Rotation measurement","Yttrium"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376557
  • Filename
    7376557
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726436