A 60GHz 360? digitally controlled phase shifter with 6-bit resolution and 2.3? maximal rms phase error in 65nm CMOS technology

This paper presents a 57-66GHz 6-bit switch type phase shifter fabricated in 65nm CMOS technology. The proposed phase shifter achieves a 6-bit resolution and a measured root mean square phase error of less than 2.3°, while the maximal insertion loss flatness is ±1.4dB. For all 64 states, the insertion loss is -20dB±3dB including pad loss over 57-66GHz. To the best of our knowledge, this is the first reported 6-bit 60GHz phase shifter in CMOS technology.