Sensor-on-CMOS dielectric characterization using temperature modulation

In this paper, on-chip temperature modulation is applied in a CMOS-based dielectric sensor for the determination of sample temperature coefficients in a microfluidic setting. System uncertainties are taken into account by a multi-step calibration with the use of on-chip metal-based switched-capacitors. Using de-ionized water as reference, the temperature coefficients of saline and methanol-water mixture are extracted at 17.5 GHz with temperature spanning from 32 ~ 37 °C.