Improved RSOL planar calibration via EM modelling and reduced spread resistive layers

In this contribution we analyze the accuracy improvements of Reciprocal SOL planar calibrations when employing full-wave EM simulation to extract the standard´s models. The calibration accuracy is benchmarked with the conventional (polynomial fit) standard definitions as well as with calibration techniques employing standards with partially-unknown parameters, as the LRM. Moreover, an outlook at a technology based on integrated circuit fabrication, employing fused silica substrates is described in terms of the achievable spread of its conductive and resistive layers. Such technology, in combination with the proposed EM modelling of the standards would allow to reduce the residual errors of planar calibrations.