DocumentCode
3733177
Title
Comprehensive Wafer Level Package Die Processing Service quality control enhancement
Author
John Qiao;Morn Jin;Wenwen He;Wei-Ting Kary Chien;Shirley Zhao
Author_Institution
Semiconductor Manufacturing International Corporation, Shanghai, China
fYear
2015
Firstpage
1684
Lastpage
1688
Abstract
Wafer Level Package (WLP) is one type of advanced package with a rapid growth and wide applications in many consumer electronic markets. However, it is different from conventional assembly that after wafer probing, there is no final electrical test to identify the defects produced by WLP Die Processing Service (DPS). This paper focused on three key processes of DPS which are backside grinding, wafer dicing, and tape and reel (TnR) to study the methods of minimizing process and quality risk, and provided a comprehensive solution based on capable processes and intelligent in-process inspections. WLP DPS can achieve the goal of delivering defect-free products to customer by implementing the methods introduced in this paper.
Keywords
"Inspection","Blades","Quality control","Silicon","Process control","Foundries","Optimization"
Publisher
ieee
Conference_Titel
Industrial Engineering and Engineering Management (IEEM), 2015 IEEE International Conference on
Type
conf
DOI
10.1109/IEEM.2015.7385934
Filename
7385934
Link To Document