• DocumentCode
    3733177
  • Title

    Comprehensive Wafer Level Package Die Processing Service quality control enhancement

  • Author

    John Qiao;Morn Jin;Wenwen He;Wei-Ting Kary Chien;Shirley Zhao

  • Author_Institution
    Semiconductor Manufacturing International Corporation, Shanghai, China
  • fYear
    2015
  • Firstpage
    1684
  • Lastpage
    1688
  • Abstract
    Wafer Level Package (WLP) is one type of advanced package with a rapid growth and wide applications in many consumer electronic markets. However, it is different from conventional assembly that after wafer probing, there is no final electrical test to identify the defects produced by WLP Die Processing Service (DPS). This paper focused on three key processes of DPS which are backside grinding, wafer dicing, and tape and reel (TnR) to study the methods of minimizing process and quality risk, and provided a comprehensive solution based on capable processes and intelligent in-process inspections. WLP DPS can achieve the goal of delivering defect-free products to customer by implementing the methods introduced in this paper.
  • Keywords
    "Inspection","Blades","Quality control","Silicon","Process control","Foundries","Optimization"
  • Publisher
    ieee
  • Conference_Titel
    Industrial Engineering and Engineering Management (IEEM), 2015 IEEE International Conference on
  • Type

    conf

  • DOI
    10.1109/IEEM.2015.7385934
  • Filename
    7385934