DocumentCode
3734537
Title
Optimization of structural and technological parameters of the field effect Hall sensor
Author
V. Volchek;I. Lovshenko;V. Stempitsky;Dao Dinh Ha;A. Belous;V. Saladukha
Author_Institution
Belarusian State University of Informatics and Radioelectronics, Minsk, Belarus
fYear
2015
Firstpage
642
Lastpage
644
Abstract
The results of optimization of magnetically sensitive element Field Hall sensor based on the MIS structure formed on a "silicon-on-insulator" (SOI LSF) parameters was presented. Main characteristics of device structure were defined using the results of Silvaco software simulation.
Keywords
"Sensitivity","Silicon","Temperature dependence","Magnetic fields","Gallium arsenide","Logic gates","Temperature sensors"
Publisher
ieee
Conference_Titel
Advanced Technologies for Communications (ATC), 2015 International Conference on
ISSN
2162-1020
Print_ISBN
978-1-4673-8372-1
Type
conf
DOI
10.1109/ATC.2015.7388410
Filename
7388410
Link To Document