• DocumentCode
    3734835
  • Title

    MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

  • Author

    Mengbing Liang; Hongyu Yu;Miranda Ngan;Stella Nickerson;Elizabeth Nofen;Lenore L. Dai

  • Author_Institution
    School of Electrical, Computer and Energy Engineering, Arizona State University, Chandler, U.S.A
  • fYear
    2015
  • fDate
    7/1/2015 12:00:00 AM
  • Firstpage
    1167
  • Lastpage
    1170
  • Abstract
    This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.
  • Keywords
    "Accelerometers","Sensitivity","Vibrations","Transducers","Liquids","Temperature sensors"
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
  • Type

    conf

  • DOI
    10.1109/NANO.2015.7388833
  • Filename
    7388833
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3734835