• DocumentCode
    3734996
  • Title

    Tailoring the luminescence of anodized aluminum oxide with atomic layer deposited ZnO thin films

  • Author

    Hong-Liang Lu; Zhang-Yi Xie;Yuan Zhang; Qing-Hua Ren;Shi-Jin Ding;David Wei Zhang

  • Author_Institution
    State Key Laboratory of ASIC and System, Institute of Advanced Nanodevices, School of Microelectronics, Shanghai 200433, China
  • fYear
    2015
  • fDate
    7/1/2015 12:00:00 AM
  • Firstpage
    346
  • Lastpage
    349
  • Abstract
    The combination of zinc oxide (ZnO) thin film and anodized aluminum oxide (AAO) with the assistance of atomic layer deposition (ALD) technique is performed to investigate into the luminescence tailoring effect and mechanism of such a light emitting device, considering the strong luminescence of both ZnO and AAO nanostructures. Nanoscale ZnO thin films were deposited by ALD into the nanopores of AAO template to fabricate large surface-to-volume ratio device with good mechanical and chemical stability. The photoluminescence of large surface-to-volume ratio nanostructured ZnO/AAO system exhibits tunable broad band light emission from ultraviolet to infrared. Given the investigated mechanism of this system, tailoring of luminescence can be achieved and possible applications are proposed according to experimental observations.
  • Keywords
    "Zinc oxide","II-VI semiconductor materials","Nanoscale devices","Luminescence","Nanostructures","Atomic layer deposition"
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
  • Type

    conf

  • DOI
    10.1109/NANO.2015.7388996
  • Filename
    7388996