Bending of multi-graphene by nanomanipulation assisted with electron beam irradiation for box structure

This paper presents a fabrication method of multi-graphene box structure by a nanomanipulation in a Field Emission Scanning Electron Microscope (FESEM). To bend the multi-graphene in plastic deformation region, the bending stress were measured using a silicon cantilever based on the nanomanipulation. In this study, defects were introduced inside the multi-graphene on the folding line of the multi-graphene by irradiating an electron beam assisted with oxygen gas. From experimental bending stress measurement, the bending stress was dropped with electron beam irradiation in oxygen gas environment. The fabrication of 3D box structure of multi-graphene was demonstrated from a cubic net of multi-graphene which was fabricated by a Focused Ion Beam (FIB) etching process. For bending the one side of the cubic net graphene, a tungsten probe was used after reforming by FIB etching as end-effector of nanomanipulator. The multi graphene was bent to form a box structure in 3D space.