Title :
Photonic Crystal based sensor for small forces
Author :
Sreenivasulu T;VR Kolli;Amresh Kumar Sahu;T Srinivas
Author_Institution :
Department of Electrical Communication Engineering, Indian Institute of Science, Bangalore, India
Abstract :
A Photonic Crystal ring resonator based force sensor is proposed. The device consists of Photonic crystal slab integrated on top of a 220nm thick silicon cantilever and is capable of sensing forces as small as 10nN. The sensitivity is derived as 8.33nN for a wavelength resolution of 0.1nm with a high quality factor of 16000.
Keywords :
"Optical ring resonators","Force","Q-factor","Photonic crystals","Force sensors","Silicon"
Conference_Titel :
Microwave and Photonics (ICMAP), 2015 International Conference on
Print_ISBN :
978-1-4673-6897-1
DOI :
10.1109/ICMAP.2015.7408710
