• DocumentCode
    3747262
  • Title

    Design of a tunable MSM photodetector for photonic integrated circuits

  • Author

    K. Komirisetty;N. Greene;D. Geddis

  • Author_Institution
    Department of Engineering, Norfolk State University, VA 23504, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper presents the design and fabrication of an integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP. Tuning is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater which is collocated on the opposite side of the PD substrate.
  • Keywords
    "Indium tin oxide","Optical resonators","Photodetectors","Silicon","Indium phosphide","III-V semiconductor materials","Tuning"
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Photonics (ICMAP), 2015 International Conference on
  • Print_ISBN
    978-1-4673-6897-1
  • Type

    conf

  • DOI
    10.1109/ICMAP.2015.7408772
  • Filename
    7408772
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3747262