DocumentCode :
3748232
Title :
Epitaxial CVD growth of high-quality graphene and recent development of 2D heterostructures
Author :
Hiroki Ago;Yui Ogawa;Kenji Kawahara;Yoshito Ito;Baoshan Hu;Carlo M. Orofeo;Pablo Soils Fernandez;Hiroko Endo;Hiroki Hibino;Seigi Mizuno;Kazuhito Tsukagoshi;Masaharu Tsuji
Author_Institution :
Institute for Materials Chemistry and Engineering (IMCE), Kyushu University, Japan
fYear :
2015
Abstract :
We demonstrate a novel epitaxial CVD method to grow high quality single-layer graphene using a thin Cu(111) film instead of conventional Cu foil. The atomically smooth Cu(111) catalyst produced the graphene with less defects and controlled orientation of the hexagonal lattice. The CVD graphene showed the carrier mobility as high as 20,000 cm2/Vs at room temperature. Using the uniform graphene sheet, densely aligned graphene nanoribbons were produced by a metal-assisted etching technique, resulting a high on/off ratio of 5,000. In addition, the epitaxial CVD method was applied to grow uniform double-layer graphene with more than 90% coverage. These GNRs and double-layer graphene are expected as promising candidates for semiconductor devices. Furthermore, heterostructures of MoS2 and graphene were developed, and unique photo-responsive devices were observed.
Keywords :
"Graphene","Epitaxial growth","Etching","Substrates","Logic gates","Optical films"
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN :
2156-017X
Type :
conf
DOI :
10.1109/IEDM.2015.7409779
Filename :
7409779
Link To Document :
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