Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method

The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.