• DocumentCode
    3752680
  • Title

    Preliminarily propagation loss evaluation of core-top etched waveguide for step-core LP21 mode converter

  • Author

    Ryosuke Sakata;Kazuhiro Tanabe;Ryo Tanaka;Haisong Jiang;Kiichi Hamamoto

  • Author_Institution
    I-EggS, Kyushu Univ., 6-1, Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Propagation loss of core-top etched Si/SiO2 waveguide was preliminarily evaluated for the first time. As a result, approximately 8 dB/cm increase has been confirmed after core-top etching.
  • Keywords
    "Propagation losses","Optical waveguides","Silicon","Iterative closest point algorithm","Etching","Scattering","Microoptics"
  • Publisher
    ieee
  • Conference_Titel
    Microoptics Conference (MOC), 2015 20th
  • Print_ISBN
    978-4-8634-8487-0
  • Type

    conf

  • DOI
    10.1109/MOC.2015.7416460
  • Filename
    7416460
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3752680